TRANSFERLESS SOFT-LITHOGRAPHY FOR THE FABRICATION OF PERISTALTIC MICROPUMP WITH DOME-SHAPE MEMBRANE
Ayub Subandi, Muhamad Ramdzan Buyong, Azrul Azlan Hamzah, Rhonira Latif, Burhanuddin Yeop Majlis, Roer Eka Pawinanto, Budi Mulyanti, Jumril Yunas
https://doi.org/10.1016/j.cap.2025.04.008
:21
:Current Applied Physics
: